Apparatus for transferring a solar wafer or solar cell during its fabrication

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United States of America Patent

PATENT NO 9190307
APP PUB NO 20130216348A1
SERIAL NO

13397820

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An apparatus for transferring a solar wafer or cell is disclosed, which comprises: i) a rotary motor; ii) a gripper for holding the solar wafer or cell; and a rotary arm connected between the rotary motor and the gripper, the rotary arm being drivable by the rotary motor in a first rotary direction through a transfer angle for transferring the solar wafer or cell between different positions. In particular, the apparatus further comprises an angle-compensating device configured to drive the gripper through a same transfer angle as the rotary arm in a second rotary direction opposite to the first rotary direction, to ensure that an angular orientation of the solar wafer or cell remains constant during rotation of the rotary arm.

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Patent Owner(s)

Patent OwnerAddress
ASM TECHNOLOGY SINGAPORE PTE LTDSINGAPORE SHUN SHUN ROAD 2 NO 7 SINGAPORE CITY SINGAPORE

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tan, Lian Hok Singapore, SG 8 36
Tu, Wen Ge Singapore, SG 4 14

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