Cryopump drain and vent
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United States of America Patent
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Nov 17, 2015
Grant Date -
Oct 24, 2013
app pub date -
Apr 20, 2012
filing date -
Apr 20, 2012
priority date (Note) -
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Abstract
A means of rapidly melting a large quantity of type II cryogen in a cryopump that is configured to contain the liquid in the warm cryopanel with the inlet to the cryopump facing up or sideways, and venting the liquid and gas in a controlled way. Rapid melting is preferably accomplished by flowing a purge gas that will condense on the cryodeposit. By not allowing the liquid to drain onto the vacuum housing the evaporation rate is limited and the maximum pressure in the cryopump can be controlled by the purge gas flow rate.
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