Patterned silicon-on-plastic (SOP) technology and methods of manufacturing the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9184049
APP PUB NO 20140252567A1
SERIAL NO

14261029

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Abstract

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A semiconductor device and methods for manufacturing the same are disclosed. The semiconductor device includes a semiconductor stack structure attached to a wafer handle having at least one aperture that extends through the wafer handle to an exposed portion of the semiconductor stack structure. A thermally conductive and electrically resistive polymer substantially fills the at least one aperture and contacts the exposed portion of the semiconductor stack structure. One method for manufacturing the semiconductor device includes forming patterned apertures in the wafer handle to expose a portion of the semiconductor stack structure. The patterned apertures may or may not be aligned with sections of RF circuitry making up the semiconductor stack structure. A following step includes contacting the exposed portion of the semiconductor stack structure with a polymer and substantially filling the patterned apertures with the polymer, wherein the polymer is thermally conductive and electrically resistive.

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Patent Owner(s)

  • RF MICRO DEVICES, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carroll, Michael Jamestown, US 70 3169
Costa, Julio Oak Ridge, US 42 1630
Glass, Elizabeth Oak Ridge, US 5 1054
Kerr, Daniel Charles Oak Ridge, US 56 2316
Willis, Don Kernersville, US 9 1065

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