Semiconductor wafer inspection system and method
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United States of America Patent
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Nov 10, 2015
Grant Date -
Oct 25, 2012
app pub date -
Dec 23, 2010
filing date -
Dec 23, 2009
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Abstract
A wafer inspection system comprises a camera having a field of view, an object mount configured to position at least a portion of surface 5 of an object 3 at an object plane 15 relative to the camera and within the field of view of the camera and at least one surface portion 41 carrying a multitude of retroreflectors 95 disposed at a greater Δd distance from the camera than the object plane and within the field of view of the camera.
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