Reaction absorber and semiconductor assembling system
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United States of America Patent
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Nov 3, 2015
Grant Date -
Oct 27, 2011
app pub date -
Sep 13, 2010
filing date -
Apr 23, 2010
priority date (Note) -
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Abstract
The present invention aims to provide a lightened reaction absorber or to provide a semiconductor assembling system with further shorter processing time and high productivity or high quality using the lightened reaction absorber. The present invention is based upon a reaction absorber provided with a counter mechanism equipped with a load unit moved in a predetermined direction by a first ball screw, a second ball screw that generates reactive force in a reverse direction to the predetermined direction and a driving unit having a driving motor that drives the first ball screw and the second ball screw, and has a characteristic of including a reaction absorbing unit with one end side equipped with a nut connected to the second ball screw and the other end side fixed to a unit base movable relatively to the counter mechanism.
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