Substrate and target plate
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United States of America Patent
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Nov 3, 2015
Grant Date -
Oct 1, 2009
app pub date -
Mar 20, 2009
filing date -
Mar 31, 2008
priority date (Note) -
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Abstract
A substrate is provided, which comprises a structured surface including a regular pattern of a plurality of elevated structures that are elevated with respect to a nominal surface of the substrate, wherein at least two dimensions are between 1 nm and 100 μm, the structured surface being configured to stimulate smooth crystallization of microcrystals or to boost hydrophobic properties. A target plate comprising a plurality of substrates is disclosed as well.
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