Method of making charge dissipative surfaces of polymeric materials with low temperature dependence of surface resistivity and low RF loss
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United States of America Patent
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Nov 3, 2015
Grant Date -
Nov 7, 2013
app pub date -
Jul 3, 2013
filing date -
Jul 14, 2008
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Abstract
A method of making a charge dissipative surface of a dielectric polymeric material with tunable (selectable) surface resistivity, comprises the step of controllably carbonizing the surface of the polymeric material in a vacuum environment by bombarding the polymeric surface with an ion beam of rare gas ions, the energy level of the ion source being from 2.5 to 30 keV, in the fluence range 1E16-5E17 ion/cm2 so as to reach a surface resistivity in the static dissipative range of 1E6 to 1E9 ohm/square at room temperature, with a temperature dependence of less than three orders of magnitude between −150° C. and +150° C., while having no impact on the RF performance of the material, with high RF power handling capability, and with tunable thermo-optical properties of the surface, including negligible impact on the thermo-optical properties and RF performance of the material, if required by applications.
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