Method of forming metal oxide hardmask
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United States of America Patent
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Oct 27, 2015
Grant Date -
Feb 26, 2015
app pub date -
Oct 2, 2014
filing date -
Dec 28, 2010
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Abstract
A method of forming a metal oxide hardmask on a template includes: providing a template constituted by a photoresist or amorphous carbon formed on a substrate; and depositing by atomic layer deposition (ALD) a metal oxide hardmask on the template constituted by a material having a formula SixM(1-x)Oy wherein M represents at least one metal element, x is less than one including zero, and y is approximately two or a stoichiometrically-determined number.
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