Coated X-ray window
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United States of America Patent
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-
Oct 27, 2015
Grant Date -
Sep 12, 2013
app pub date -
Dec 3, 2010
filing date -
Dec 3, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
An X-ray window including a primary and a secondary window element. In order to evaporate debris by ohmic heating, current flows through the secondary (upstream) window element. Meanwhile, electric charge originating from electron irradiation and/or depositing charged particles is to be drained off the window element. To prevent large debris particles from short-circuiting the window element and changing the desired heating pattern, the current for heating the window element flows through a layer which is insulated from the charge-drain layer.
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| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Apr 27, 2027 |
