Nano imprinting with reusable polymer template with metallic or oxide coating
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United States of America Patent
Stats
-
Oct 27, 2015
Issued Date -
N/A
app pub date -
Mar 17, 2014
filing date -
Mar 15, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Methods and systems are provided for fabricating polymer-based imprint lithography templates having thin metallic or oxide coated patterning surfaces. Such templates show enhanced fluid spreading and filling (even in absence of purging gases), good release properties, and longevity of use. Methods and systems for fabricating oxide coated versions, in particular, can be performed under atmospheric pressure conditions, allowing for lower cost processing and enhanced throughput.
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International Classification(s)
- 2014 Application Filing Year
- B82Y Class
- 1019 Applications Filed
- 1006 Patents Issued To-Date
- 98.73 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 5 Citation Count
- B82Y Class
- 0 % this patent is cited more than
- 10 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Apr 27, 2027 |
