Acoustic wave filter manufacturing method using photo-definable epoxy for suppression of unwanted acoustic energy
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United States of America Patent
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Oct 20, 2015
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Jul 28, 2010
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Nov 25, 2008
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Abstract
A SAW filter is fabricated with input and output transducers on a piezoelectric substrate and an epoxy based photo-definable acoustic absorber on the substrate for suppressing unwanted acoustic waves. The photo-definable acoustic absorber has a viscosity in a range from about 50 centistokes to 12000 centistokes and a thickness from about 10 microns to 120 microns. One acoustic absorber includes an SU-8 family member epoxy.
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