Charged particle beam drawing apparatus and drawing chamber

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9165747
APP PUB NO 20150021495A1
SERIAL NO

14326997

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Abstract

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A charged particle beam drawing apparatus includes: a stage configured to support a specimen as a drawing target; and an airtight drawing chamber formed into a box shape provided with a side wall and a bottom plate, and configured to house the stage. The bottom plate includes: multiple support portions connected to the side wall and configured to support the stage; and a curved portion connected to the support portions and having a convex shape curved outward.

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Patent Owner(s)

  • NUFLARE TECHNOLOGY, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakagawa, Yoshinori Numazu, JP 180 2133
Nakazawa, Seiichi Yokohama, JP 6 32
Saito, Hiroyasu Yokohama, JP 10 30

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