Micromechanical device

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United States of America Patent

PATENT NO 9164277
APP PUB NO 20130301101A1
SERIAL NO

13938276

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Abstract

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The force on the electrodes of an electrostatic field is used so that lateral tensile or compressive forces result which can deform a deformable element or can strongly deflect a deflectable structure. For this, a micromechanical device includes, apart from an electrode and a deformable element, an insulating spacer layer via which the electrode is fixed to the deformable element, wherein the insulating spacer layer is structured into several spaced-apart segments along a lateral direction, so that by applying an electric voltage between the electrode and the deformable element lateral tensile or compressive forces bending the deformable element along the lateral direction result. Thereby, the problem that normally accompanies electrostatic drives, namely the problem of the pull-in effect, is overcome. The deflection of the deformable element can be much larger than the gaps of the two electrodes, i.e. the above-mentioned electrode and the deformable element. A usage as a sensor is also possible.

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Patent Owner(s)

Patent OwnerAddress
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E VHANSASTRASSE 27C MUENCHEN 80686

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Conrad, Holger Dresden, DE 20 117
Sandner, Thilo Dresden, DE 16 164
Schenk, Harald Dresden, DE 39 415
Schirrmann, Christian Dresden, DE 2 52
Schmidt, Jan-Uwe Dresden, DE 2 29
Zimmer, Fabian Dresden, DE 4 33

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