Angular velocity detection device and angular velocity sensor including the same
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United States of America Patent
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Oct 20, 2015
Grant Date -
Apr 18, 2013
app pub date -
Dec 5, 2012
filing date -
Jun 25, 2010
priority date (Note) -
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Abstract
An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.
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