Heating apparatus for X-ray inspection
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United States of America Patent
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Oct 13, 2015
Grant Date -
Jun 23, 2011
app pub date -
Feb 25, 2010
filing date -
Apr 7, 2009
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Abstract
In a heating apparatus for X-ray inspection which heats at least one surface of a sample (7) by convection to perform an X-ray inspection, a planar heater 1 formed of an X-ray transmitting material having an opening 1b for passing gas is provided at a window part 22 for making an X-ray observation of the sample. Thereby, a board can be subjected to convection heating uniformly without enlarging or complicating the apparatus.
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