Systems and methods for monitoring and controlling particle sizes in slurries

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United States of America Patent

PATENT NO 9159573
APP PUB NO 20150170929A1
SERIAL NO

14132167

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Abstract

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Systems and methods are provided for preparing a plurality of slurry particles. The system includes: a tank configured to contain and provide the slurry particles, a sampling module configured to sample at least one slurry particle within the tank and obtain at least one parameter related to a particle size, and a controller coupled to the tank and the sampling module, configured to vibrate the slurry particles within the tank based on the at least one parameter.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDHSIN-CHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Yung-Long New Taipei, TW 15 65
Chiang, I-Chen Hsinchu, TW 4 2
Tseng, Chih-Chiang Hsinchu County, TW 26 353
Yin, Chi-Chan New Taipei, TW 1 2

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