Systems and methods for a gas field ionization source
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United States of America Patent
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Oct 13, 2015
Grant Date -
Sep 11, 2008
app pub date -
Apr 10, 2008
filing date -
Oct 16, 2003
priority date (Note) -
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Abstract
In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.
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