Reactor and method for production of silicon
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 13, 2015
Grant Date -
Apr 26, 2012
app pub date -
May 27, 2010
filing date -
May 29, 2009
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Reactor for producing silicon by chemical vapor deposition, the reactor comprising a reactor body that forms a container, at least one inlet for a silicon-bearing gas, at least one outlet, and at least one heating device as a part of or operatively arranged to the reactor, distinctive in that at least one main part of the reactor, which part is exposed for silicon-bearing gas and which part is heated for deposition of silicon on said part, is produced from silicon. Method for operation of the reactor.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully