Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system
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United States of America Patent
Stats
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Oct 6, 2015
Grant Date -
Nov 28, 2013
app pub date -
Jul 31, 2013
filing date -
Mar 15, 2010
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A regenerative amplifier according to one aspect of this disclosure is used in combination with a laser device, and the regenerative amplifier may include: a pair of resonator mirrors constituting an optical resonator; a slab amplifier provided between the pair of the resonator mirrors for amplifying a laser beam with a predetermined wavelength outputted from the laser device; and an optical system disposed to configure a multipass optical path along which the laser beam is reciprocated inside the slab amplifier, the optical system transferring an optical image of the laser beam at a first position as an optical image of the laser beam at a second position.
First Claim
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International Classification(s)
- 2013 Application Filing Year
- B82Y Class
- 1156 Applications Filed
- 1150 Patents Issued To-Date
- 99.49 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- B82Y Class
- 0 % this patent is cited more than
- 10 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Apr 6, 2027 |
