Heated AFM layer deposition and cooling process for TMR magnetic recording sensor with high pinning field

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United States of America Patent

PATENT NO 9147408
SERIAL NO

14216285

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Systems and methods are provided for manufacturing a magnetic recording sensor for use in a magnetic reader, such as a tunneling magnetoresistance (TMR) readers. The magnetic recording sensor can be manufactured by heating a substrate in a first chamber and depositing an antiferromagnetic (AFM) layer on the heated substrate. Additionally, a first pinned layer is added onto the AFM layer, and the substrate is subsequently cooled.

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Patent Owner(s)

Patent OwnerAddress
WESTERN DIGITAL TECHNOLOGIES INC5601 GREAT OAKS PARKWAY SAN JOSE CA 95119

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Diao, Zhitao Fremont, US 47 2828
Jiang, Xin San Jose, US 211 2822
Kaiser, Christian San Jose, US 68 1719
Leng, Qunwen Palo Alto, US 57 3352
Zhao, Tong Fremont, US 226 3549
Zheng, Yuankai Fremont, US 111 2192

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