Cleaning system and cleaning method

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United States of America Patent

PATENT NO 9142424
APP PUB NO 20120291806A1
SERIAL NO

13575042

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Importance

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Abstract

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Provided are a system and method capable of providing a sulfuric acid solution containing peroxosulfuric acid for use in cleaning even in an installation-limited space such as a clean room while suppressing the fluid pressure in a heating part such as a rapid heating heater.

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Patent Owner(s)

Patent OwnerAddress
KURITA WATER INDUSTRIES LTDTOKYO 164-0001

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Otsu, Toru Tokyo, JP 27 816
Uchida, Minoru Tokyo, JP 61 507

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