Method for producing halogenated polysilanes
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United States of America Patent
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Sep 22, 2015
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Dec 20, 2012
app pub date -
Dec 6, 2010
filing date -
Dec 4, 2009
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Abstract
A process for preparing a halogenated polysilane HpSin−pX(2n+2)−p with n=1 to 50; 0≦p≦2n+1, and X=F, Cl, Br, I, as an individual compound or a mixture of compounds, from a mixture which includes the halogenated polysilane or in which the halogenated polysilane is formed, additionally includes boron-containing impurities, wherein a) the mixture is admixed with at least 1 ppbw (parts per billion per weight) of a siloxane-forming oxidizing agent or siloxane, the boron-containing impurities forming compounds having a volatility and/or solubility different from the halogenated polysilanes, b) the halogenated polysilane is separated from the compound(s), and c) not more than 1 ppmw of water and not less than 1 ppb of siloxanes are present.
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