Method of investigating a sample surface
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United States of America Patent
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Sep 15, 2015
Grant Date -
Sep 25, 2014
app pub date -
Oct 4, 2012
filing date -
Oct 5, 2011
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Abstract
A method of investigating a sample surface. A probe is brought into close proximity with a first sample and scanned across the first sample. A response of the probe to its interaction with the sample is monitored using a detection system and a first data set is collected indicative of said response. The probe and/or sample is tilted through a tilt angle. The probe is scanned across the first sample or across a second sample after the tilting step, and a response of the probe to its interaction with the scanned sample is monitored using a detection system and a second data set is collected indicative of said response. The method includes the additional step of analyzing the first data set prior to tilting the probe and/or sample in order to determine the tilt angle.
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