Emitter structure, gas ion source and focused ion beam system
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United States of America Patent
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Sep 8, 2015
Grant Date -
Oct 2, 2014
app pub date -
Mar 25, 2014
filing date -
Mar 26, 2013
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Abstract
There is provided an emitter structure, a gas ion source including the emitter structure, and a focused ion beam system including the gas ion source. The emitter structure includes a pair of conductive pins which are fixed to a base member, a filament which is connected between the pair of conductive pins, and an emitter which is connected to the filament and has a sharp tip. A supporting member is fixed to the base material, and the emitter is connected to the supporting member.
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