Laser-enhanced chemical etching of nanotips

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United States of America Patent

PATENT NO 9128117
APP PUB NO 20140242805A1
SERIAL NO

14097211

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Abstract

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A method for sharpening a nanotip involving a laser-enhanced chemical etching is provided. The method includes immersing a nanotip in an etchant solution. The nanotip includes a base and an apex, the apex having a diameter smaller than a diameter of the base. The method also includes irradiating the nanotip with laser fluence to establish a temperature gradient in the nanotip along a direction from the apex to the base of the nanotip such that the apex and base are etched at different rates.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES SINGAPORE PTE LTD60 WOODLANDS INDUSTRIAL PARK D STREET 2 SINGAPORE 738406

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bin, Dawood Mohammed Khalid Singapore, SG 1 0
Lam, Jeffrey C Singapore, SG 6 235
Mai, ZhiHong Singapore, SG 7 14
Ng, Tsu Hau Singapore, SG 2 0

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