Driving apparatus, exposure apparatus, and method of manufacturing article
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United States of America Patent
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Sep 1, 2015
Grant Date -
Oct 17, 2013
app pub date -
Mar 14, 2013
filing date -
Apr 16, 2012
priority date (Note) -
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Abstract
The present invention provides a driving apparatus including an axis member supported on a base, and a movable member movable along the axis member, comprising a plurality of plate members each including a through-hole through which the axis member penetrates and surrounding the axis member, wherein the plurality of plate members are located apart from each other in a moving direction of the movable member.
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