Cyclic compound, method for producing same, composition, and method for forming resist pattern

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9122153
APP PUB NO 20140308615A1
SERIAL NO

14238375

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A cyclic compound having a molecular weight of 500 to 5000 is represented by the following formula (1),

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
MITSUBISHI GAS CHEMICAL COMPANY INCCHIYODA-KU TOKYO 100-8324

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Echigo, Masatoshi Hiratsuka, JP 137 625
Yamakawa, Masako Hiratsuka, JP 10 137

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 Mar 1, 2027
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00