Imprint apparatus and method of manufacturing article
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United States of America Patent
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Sep 1, 2015
Grant Date -
Sep 29, 2011
app pub date -
Mar 16, 2011
filing date -
Mar 24, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
An imprint apparatus which cures a resin dispensed on a substrate while the resin and a pattern surface of a mold are in contact with each other, comprises a supply portion configured to supply a gas, used to accelerate filling of a concave portion of the pattern surface of the mold with the resin, to a space which the pattern surface of the mold faces, and a controller configured to control the supply portion to supply the gas to the space before the resin and the pattern surface of the mold are brought into contact with each other, wherein the supply portion is configured to supply the gas to the space via a porous portion formed in at least part of the mold.
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