Device for detecting the thinning down of the substrate of an integrated circuit chip
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United States of America Patent
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Sep 1, 2015
Grant Date -
Mar 13, 2014
app pub date -
Nov 18, 2013
filing date -
Jun 15, 2009
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Abstract
A device for detecting the thinning down of the substrate of an integrated circuit chip, including, in the active area of the substrate, bar-shaped diffused resistors connected as a Wheatstone bridge, wherein: first opposite resistors of the bridge are oriented along a first direction; the second opposite resistors of the bridge are oriented along a second direction; and the first and second directions are such that a thinning down of the substrate causes a variation of the imbalance value of the bridge.
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