Composite slurries of nano silicon carbide and alumina
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United States of America Patent
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Sep 1, 2015
Grant Date -
Apr 16, 2009
app pub date -
Oct 3, 2008
filing date -
Oct 5, 2007
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Abstract
Improved slurry compositions comprising silicon carbide particles and alumina particles dispersed within an aqueous medium. Slurry compositions in the form of abrasive slurry compositions for use chemical mechanical planarization (CMP) processes, particularly abrasive slurry compositions for polishing of sapphire, and methods of use.
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