Surface treatments for alignment of block copolymers
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United States of America Patent
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Sep 1, 2015
Grant Date -
Feb 21, 2013
app pub date -
Mar 17, 2011
filing date -
Mar 18, 2010
priority date (Note) -
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Abstract
The present invention relates to a method the synthesis and utilization of random, cross-linked, substituted polystyrene copolymers as polymeric cross-linked surface treatments (PXSTs) to control the orientation of physical features of a block copolymer deposited over the first copolymer. Such methods have many uses including multiple applications in the semiconductor industry including production of templates for nanoimprint lithography.
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