Radiation-sensitive resin composition, compound and producing method of compound
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United States of America Patent
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Sep 1, 2015
Grant Date -
Oct 11, 2012
app pub date -
Jun 18, 2012
filing date -
Dec 25, 2009
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Abstract
A radiation-sensitive resin composition includes a compound shown by a following general formula (A), a solvent and a resin having an acid-labile group. Each of R1 and R2 independently represents a substituted or unsubstituted monovalent hydrocarbon group having 1 to 25 carbon atoms. Each of X and Z independently represents a substituted or unsubstituted divalent hydrocarbon group having 1 to 25 carbon atoms. Y represents a single bond or the like. n represents an integer from 0 to 5.
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