Process for preparing ceramics, ceramics thus obtained and uses thereof, especially as a sputtering target
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United States of America Patent
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Sep 1, 2015
Grant Date -
Dec 24, 2009
app pub date -
May 17, 2007
filing date -
May 18, 2006
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Abstract
Process for preparing a ceramic from an inorganic base material that is in the form of a powder having a high melting point, comprising a step of mixing the powder of the inorganic base material with a second inorganic component also in powder form and which acts as a dopant for the inorganic base material. The dopant is constituted by a single inorganic material or by a mixture of at least two inorganic materials having a dopant effect on the inorganic base material. The process comprises a sintering step carried out at a high temperature. The ceramics obtained, because of their high density, are advantageously used as a target element. Films and electrodes obtained from these ceramics exhibit particularly advantageous properties.
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