Dielectric layer for electrostatic chuck and electrostatic chuck
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United States of America Patent
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Sep 1, 2015
Grant Date -
Apr 17, 2014
app pub date -
Oct 15, 2013
filing date -
Oct 15, 2012
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Abstract
A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 108 to 1013 (Ω·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.
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