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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
EVONIK OPERATIONS GMBH	45128 ESSEN

International Classification(s)

• C01B:NON-METALLIC ELEMENTS; COMPOUNDS THEREOF
• C07F:ACYCLIC, CARBOCYCLIC, OR HETEROCYCLIC COMPOUNDS CO....
• B01J:CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, CO....
• B01D:SEPARATION

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Goetz, Christian	Selingenstadt, DE	16	55
Hoppe, Carl-Friedrich	Gruendau, DE	10	34
Rauleder, Hartwig	Rheinfelden, DE	105	730

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Mar 1, 2027

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
September 01, 2015	US,9120673,B2   US9120673B2	GRANTED PATENT AS SECOND PUBLICATION
January 22, 2015	US,20150023859,A1   US20150023859A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9120673

Production of trisilylamine from monochlorosilane and ammonia by use of inert solvent

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