Ultrasonic transducer structure, ultrasonic transducer, and method of manufacturing ultrasonic transducer
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United States of America Patent
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Sep 1, 2015
Grant Date -
Jul 4, 2013
app pub date -
Sep 14, 2012
filing date -
Dec 28, 2011
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Abstract
An ultrasonic transducer structure, an ultrasonic transducer, and a method of manufacturing the ultrasonic transducer are provided. The ultrasonic transducer structure includes a driving wafer that includes a driving circuit; and an ultrasonic transducer wafer that is disposed on the driving wafer and includes a first wafer in which a via-hole is formed, a first insulating layer formed on the first wafer, a second wafer spaced apart from the first insulating layer, and a cavity formed between the first insulating layer and the second wafer.
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