Electro-acoustic transducer and method of manufacturing the same
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United States of America Patent
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Sep 1, 2015
Grant Date -
Feb 28, 2013
app pub date -
Feb 21, 2012
filing date -
Aug 23, 2011
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Abstract
Electro-acoustic transducers and methods of manufacturing the electro-acoustic transducer are provided. An electro-acoustic transducer includes: a first wafer including a first substrate in which a plurality of electro-acoustic transducer cells are formed; and a second wafer disposed in a lower portion of the first wafer, and including a second substrate in which a plurality of through wafer vias are formed. A method of manufacturing an electro-acoustic transducer includes: forming a plurality of electro-acoustic transducer cells in a first substrate of a first wafer; forming a plurality of through wafer vias in a second substrate of a second wafer; and bonding the first and second wafers to each other.
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