Deposition apparatus
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United States of America Patent
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Sep 1, 2015
Grant Date -
Feb 13, 2014
app pub date -
Jul 23, 2013
filing date -
Aug 7, 2012
priority date (Note) -
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Abstract
A deposition apparatus includes a substrate supporting pin that is fixed to a supporting plate through an autoalignment control unit to prevent the substrate supporting pin from being broken when loading or unloading a substrate, thereby preventing damaging the substrate and also preventing decreased yield that may result due to the breakage of the substrate supporting pin.
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