Brush cleaning system

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United States of America Patent

PATENT NO 9119464
SERIAL NO

13362635

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Abstract

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A brush cleaning system comprising: a plate comprising at least one of silicon nitride (SixNy) or silicon oxide (SiaOb), wherein the plate has a static charge on a surface thereof; and a machine configured to rotate a brush in contact with the static charged surface of the plate.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Liang-Guang Hsinchu, TW 82 310
Huang, Fu-Ming Shengang Township, TW 28 58
Kuo, Han-Hsin Tainan, TW 16 137
Peng, He Hui Changhua, TW 16 38
Tsai, Chi-Ming New Taipei, TW 98 501

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