Radiation source
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United States of America Patent
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Aug 25, 2015
Grant Date -
Jun 12, 2014
app pub date -
Dec 13, 2011
filing date -
Aug 12, 2011
priority date (Note) -
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Abstract
A radiation source includes a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma formation location; a laser configured to output laser radiation, the laser radiation directed at the fuel droplets at the plasma formation location to generate, in use, a radiation generating plasma; and a catch configured to catch fuel droplets that pass the plasma formation location. The catch includes a container configured to contain a fluid; a driver configured to drive the fluid, to cause the fluid to move; the catch being configured such that the fuel droplets are incident on that moving fluid.
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