Electromechanical devices and methods for fabrication of the same
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United States of America Patent
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Aug 25, 2015
Grant Date -
Aug 16, 2012
app pub date -
May 31, 2011
filing date -
Dec 1, 2008
priority date (Note) -
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Abstract
A fabricated electromechanical device is disclosed herein. An exemplary device includes, a substrate, at least one layer of a high-transconductance material separated from the substrate by a dielectric medium, a first electrode in electrical contact with the at least one layer of a high-transconductance material and separated from the substrate by at least one first supporting member, a second electrode in electrical contact with the layer of a high-transconductance material and separated from the substrate by at least one second supporting member, where the first electrode is electrically separate from the second electrode, and a third electrode separated from the at least one layer of high-transconductance material by a dielectric medium and separated from each of the first electrode and the second electrode by a dielectric medium.
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