Electrostatic lens and charged particle beam apparatus using the same
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United States of America Patent
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Aug 25, 2015
Grant Date -
Aug 14, 2014
app pub date -
Sep 27, 2012
filing date -
Sep 30, 2011
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Abstract
To provide an electrostatic lens which improves an irradiation accuracy of an electron beam while satisfying the need for higher throughput. An electrostatic lens according to one embodiment of the present invention includes a substrate which includes an insulating plate in which a plurality of first through holes that allow an electron beam to pass through are formed, a plurality of electrodes that are formed on an inner wall of the plurality of first through holes, and a plurality of wirings that are formed on the insulating plate and are electrically connected to each of the electrodes, wherein the plurality of electrodes are electrically independent from each other.
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