Low drift scanning probe microscope
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United States of America Patent
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Aug 25, 2015
Grant Date -
Mar 12, 2015
app pub date -
Oct 21, 2014
filing date -
Mar 19, 2010
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Abstract
A scanning probe microscope, such as an atomic force microscope, and method including z-stage and a bridge structure. A scanner containing a probe is mounted to the z-stage, which is movable in the z-axis to raise and lower the probe. The method reduces thermal drift of the z-stage and the bridge using a combination of heating elements thermally coupled to the z-stage and the bridge, ambient temperature sensors, and a controller to actively control the heating elements to maintain the bridge and the z-stage at an elevated temperature. Ideally, the temperatures in the system are selected so as to reduce drift between the probe and the sample during AFM scanning, wherein the drift is preferably maintained at less than about 1 nm for an ambient temperature change of about 1° C.
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