Method and apparatus of tuning a scanning probe microscope

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United States of America Patent

PATENT NO 9116167
APP PUB NO 20150204902A1
SERIAL NO

14675140

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Abstract

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An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.

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Patent Owner(s)

Patent OwnerAddress
BRUKER NANO INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hu, Shuiqing Santa Barbara, US 28 165
Huang, Lin Santa Barbara, US 228 2115
Pittenger, Bede Santa Barbara, US 12 33
Silva, Paul Goleta, US 7 69
Su, Chanmin Ventura, US 62 764

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