Linearity enhancement of capacitive transducers by auto-calibration using on-chip neutralization capacitors and linear actuation
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United States of America Patent
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Aug 25, 2015
Grant Date -
Jun 20, 2013
app pub date -
Jul 17, 2012
filing date -
Sep 16, 2011
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Abstract
A system and method are disclosed for automatically calibrating capacitive transducers to neutralize feed-through capacitance using linear actuation. The method includes starting with an initial neutralization capacitance, applying no electrostatic force and two known electrostatic forces to a proof mass of the transducer, recording the transducer output changes due to the applied forces; and determining how to revise neutralization capacitance based on the changes. The method can use a binary search to find a final neutralization capacitance providing the best linearity. The method can include comparing the final linearity to a threshold linearity. The electrostatic forces can be applied using a charge control method where the electrostatic force is a linear function of the actuation duration. The linear actuation can be used for continuous self-test of capacitive sensors.
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