Dry non-plasma treatment system and method of using
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 25, 2015
Grant Date -
Dec 11, 2014
app pub date -
Aug 22, 2014
filing date -
Jun 22, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A dry non-plasma treatment system and method for removing oxide material is described. The treatment system is configured to provide chemical treatment of one or more substrates, wherein each substrate is exposed to a gaseous chemistry under controlled conditions including surface temperature and gas pressure. Furthermore, the treatment system is configured to provide thermal treatment of each substrate, wherein each substrate is thermally treated to remove the chemically treated surfaces on each substrate.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully