Vitreous silica crucible and method of manufacturing the same

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United States of America Patent

PATENT NO 9115019
APP PUB NO 20120255487A1
SERIAL NO

13145094

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Abstract

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Provided is a method of manufacturing a vitreous silica crucible for pulling a silicon single crystal which can suppress melt surface vibration of silicon melt filled therein and has a long lifetime. The crucible includes a peripheral wall portion, a curved portion and a bottom portion, and has a plurality of micro recesses on the specific region of the inner surface of the peripheral wall portion.

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Patent Owner(s)

Patent OwnerAddress
SUMCO CORPORATION1-2-1 SHIBAURA MINATO-KU TOKYO 105-8634

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kishi, Hiroshi Akita, JP 143 1432
Sudo, Toshiaki Akita, JP 56 140
Suzuki, Eriko Akita, JP 23 197

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