Piezoelectric element module, ultrasonic transducer, ultrasonic device, liquid ejecting head, liquid ejecting apparatus, and piezoelectric element module manufacturing method
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United States of America Patent
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Aug 25, 2015
Grant Date -
Oct 2, 2014
app pub date -
Mar 24, 2014
filing date -
Mar 28, 2013
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Abstract
A first piezoelectric element having a first piezoelectric layer and a second piezoelectric element having a second piezoelectric layer, which is different from the first piezoelectric layer, are included on the same substrate. The first piezoelectric layer has a d constant greater than a d constant of the second piezoelectric layer.
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