Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma
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United States of America Patent
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Aug 18, 2015
Grant Date -
Jun 27, 2013
app pub date -
Oct 6, 2011
filing date -
Oct 6, 2010
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Abstract
The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.
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