System and method for generating extreme ultraviolet light
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United States of America Patent
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Aug 18, 2015
Grant Date -
Sep 27, 2012
app pub date -
Jun 8, 2012
filing date -
Feb 19, 2010
priority date (Note) -
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Abstract
A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.
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